薄膜晶体管液晶显示器(TFT-LCD)通常采用两个加工过程并行进行加工成成品,如图1所示。其基本工艺如下:

● 通过前玻璃基板/彩色滤光基板工艺过程形成精确排列的彩色滤光层。 ● 薄膜基板工艺形成薄膜晶体管液晶(TFT)阵列及显示器像素控制所用其它电子元件。每个像素一般对应三个薄膜晶体管液晶(TFT),每个像素控制一个共同构成一个像素的“色点”。薄膜形成工艺采用与半导体制造技术相类似的CVD、Etch及PVD等工艺技术。此类工艺步骤应反复数次,连续膜层方可形成一个功能元件(图2)。
● 两块基板合二为一,中间注入液晶材料。 ● 最后组装背光及驱动电子元件,制造出TFT-LCD 模块。 部分技术名词英文缩写 AMLCD Active Matrix Liquid Crystal Display a-Si Amorphous Silicon BM Black Matrix COG Chip on Glass COO Cost of Ownership CRT cathode-ray Tube CVD Chemical Vapor Deposition EL Electroluminescence EWS Engineering Work Station FED Field Emission Display FPD Flat Panel Display HDTV High Definition Television IPS In-Plane Switching ITO Indium Tin Oxide LCD Liquid Crystal Display LED Light Emitting Diode MTBF Mean Time Between Failure MTTR Mean Time To Repair NTSC National Television System Commiee OCB Optically Compensated Bend PAL Phase Alternation by Line color telision PALC Plasma Addressed Liquid Crystal PDP Plasma Display Panel p-Si Poly crystal Silicon PECVD Plasma Enhanced CVD PVD Physical Vapor Deposition RF Radio Frequency RGB Red, Green, Blue RIE Reactive Ion Etching SOG Spin on Glass STN Super Twisted Nematic SVGA Super Video Graphic Array SXVA Super Extended Graphic Array TEOS Tetraethylorthosilicate TFT Thin Film Transistor UXGA Ultra Extended Graphic Array VA Vertical Aligned VGA Video Graphic Array XGA Extended Graphic Array |